PAN Yinrong, HU Youhua, ZHU Huibiao. The Monte Carlo Simulation Method for Quantitative Analysis of a Binary Film on a Substrate[J]. Chinese Journal of Applied Probability and Statistics, 2001, 17(2): 180-184.
Citation:
PAN Yinrong, HU Youhua, ZHU Huibiao. The Monte Carlo Simulation Method for Quantitative Analysis of a Binary Film on a Substrate[J]. Chinese Journal of Applied Probability and Statistics, 2001, 17(2): 180-184.
PAN Yinrong, HU Youhua, ZHU Huibiao. The Monte Carlo Simulation Method for Quantitative Analysis of a Binary Film on a Substrate[J]. Chinese Journal of Applied Probability and Statistics, 2001, 17(2): 180-184.
Citation:
PAN Yinrong, HU Youhua, ZHU Huibiao. The Monte Carlo Simulation Method for Quantitative Analysis of a Binary Film on a Substrate[J]. Chinese Journal of Applied Probability and Statistics, 2001, 17(2): 180-184.
The Monte Carlo Simulation Method for Quantitative Analysis of a Binary Film on a Substrate
In this paper the Monte Carlo method is utilized to simulate incident electron scattering and characteristic x-ray emission in a film, and a calculation method of the composition of a binary film on a substrate is proposed. Calculations for several films are made, and agreement with measured values is obtained.
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